Silicon as a microfluidic material for imaging and incubation of droplets

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Lobato-Dauzier, Nicolas | Deteix, Robin | Gines, Guillaume | Baccouche, Alexandre | Hapsianto, Benediktus, Nixon | Okumura, Shu | Mariette, Guilhem | Belharet, Djaffar | Queste, Samuel | Jalabert, Laurent | Denoual, Matthieu | Rondelez, Yannick | Toshiyoshi, Hiroshi | Fujita, Hiroyuki | Kim, Soo, Hyeon | Fujii, Teruo | Genot, Anthony, J

Edité par CCSD -

N.L.D. designed the chambers, fabricated them and tested them. R.D built and tested the thermal control platform. N.L.D. & RD performed experiments, and analyzed the data. G.G performed the digital assay and analyzed the data. A.B provided support on the biochemical reactions and advice on initial chamber designs. B.N.H. and S.O tested the chamber and gave feedback to improve it. G.M. worked on the chamber sealing to reach high temperatures. S.Q. and D.B. scaled and characterized the process to 6 inch wafers. M.D. assisted with the design of the thermal control platform. L.J, S.H.K, H.F, Y.R. and H.T provided advice for the design and fabrication. T.F and A.J.G supervised the research.

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